Optical And Protective Properties Of Hard Carbon Coatings

B. Dischler; A. Bubenzer; P. Koidl; G. Brandt

doi:10.1117/12.935488

18 September 1983 Optical And Protective Properties Of Hard Carbon Coatings

B. Dischler, A. Bubenzer, P. Koidl, G. Brandt

Proceedings Volume 0400, New Optical Materials; (1983) https://doi.org/10.1117/12.935488
Event: 1983 International Technical Conference/Europe, 1983, Geneva, Switzerland

Abstract

In recent years amorphous carbon coatings found growing interest because of their optical and protective properties. We have deposited hydrogenated amorphous carbon films (a-C:H) from an RF excited discharge in benzene vapour. Substrates include germanium, glass and MgF2. The refractive index can be tuned between 1.8 and 2.2 and efficient antireflection coatings on Ge have been prepared. We have determined the optical absorption from the UV to the IR range (0.2 - 25 μm). A typical 1 µm thick a-C:H film is transparent (> 50% transmission) from 750 nm to the far infrared. Amorphous carbon films are harder than sapphire and are resistant to concentrated acids and bases.

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B. Dischler, A. Bubenzer, P. Koidl, and G. Brandt "Optical And Protective Properties Of Hard Carbon Coatings", Proc. SPIE 0400, New Optical Materials, (18 September 1983); https://doi.org/10.1117/12.935488

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