Electron Beam Fabrication And Characterization Of Fresnel Zone Plates For Soft X-Ray Microscopy

D Kern; P Coane; R Acosta; T.H. P. Chang; R Feder; P Houzego; W Molzen; J Powers; A Speth; R Viswanathan

doi:10.1117/12.939200

27 March 1984 Electron Beam Fabrication And Characterization Of Fresnel Zone Plates For Soft X-Ray Microscopy

D Kern, P Coane, R Acosta, T.H. P. Chang, R Feder, P Houzego, W Molzen, J Powers, A Speth, R Viswanathan

Proceedings Volume 0447, Science with Soft X-Rays; (1984) https://doi.org/10.1117/12.939200
Event: 1983 Brookhaven Conference: Science with Soft X-Rays, 1983, Upton, United States

Abstract

A high resolution Vector Scan electron beam lithography system for fabrication of structures with minimum dimensions below 100 nm is described. A selection was made from a variety of processes suitable for high resolution fabrication, in order to provide the desired properties of apodized Fresnel zone plates used in the Stony Brook X-ray scanning microscope. Experimental characterization of the zone plates with regard to resolution and efficiency in the microscope is described.

Citation Download Citation

D Kern, P Coane, R Acosta, T.H. P. Chang, R Feder, P Houzego, W Molzen, J Powers, A Speth, and R Viswanathan "Electron Beam Fabrication And Characterization Of Fresnel Zone Plates For Soft X-Ray Microscopy", Proc. SPIE 0447, Science with Soft X-Rays, (27 March 1984); https://doi.org/10.1117/12.939200

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