Laser Interferometer Measurement Systems For Machine Tool Industry And Microelectronics

F. Petru; B. Popela; A. Stejskal; J. Krsek

doi:10.1117/12.942411

18 January 1985 Laser Interferometer Measurement Systems For Machine Tool Industry And Microelectronics

F. Petru, B. Popela, A. Stejskal, J. Krsek

Proceedings Volume 0473, Symposium Optika '84; (1985) https://doi.org/10.1117/12.942411
Event: Symposium Optika '84, 1984, Budapest, Hungary

Abstract

The article describes the laser interference measuring systems for machine-tool industry and microelectronics. They work on the Michelson interferometer principle with a single-frequency laser. The system for machine-tool industry measures lengths with the resolution of O,1 um, velocities, small angles, straightness and flatness. The system for microelectronics measures position in two orthogonal coordinates with the resolution of 40 nm.

Citation Download Citation

F. Petru, B. Popela, A. Stejskal, and J. Krsek "Laser Interferometer Measurement Systems For Machine Tool Industry And Microelectronics", Proc. SPIE 0473, Symposium Optika '84, (18 January 1985); https://doi.org/10.1117/12.942411

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