Industrial Excimer Lasers: Continous Operation And Proven Applications

Lindsay Austin; Dirk Basting; Hans-Jurgen Kahlert; Wolfgang Muckenheim; Ulrich Rebhan

doi:10.1117/12.944382

12 July 1988 Industrial Excimer Lasers: Continous Operation And Proven Applications

Lindsay Austin, Dirk Basting, Hans-Jurgen Kahlert, Wolfgang Muckenheim, Ulrich Rebhan

Proceedings Volume 0894, Gas Laser Technology; (1988) https://doi.org/10.1117/12.944382
Event: 1988 Los Angeles Symposium: O-E/LASE '88, 1988, Los Angeles, CA, United States

Abstract

Recent tests confirm that commercially available excimer lasers meet most industrial requirements including the most strenuous - continuous constant power operation at maximum specified power ratings. Test results include lifetime data plus the determination of maintenance and operating costs. A few proven industrial applications are reviewed as well as the field experience on their production lines. The field and test data compare favorably.

Citation Download Citation

Lindsay Austin, Dirk Basting, Hans-Jurgen Kahlert, Wolfgang Muckenheim, and Ulrich Rebhan "Industrial Excimer Lasers: Continous Operation And Proven Applications", Proc. SPIE 0894, Gas Laser Technology, (12 July 1988); https://doi.org/10.1117/12.944382

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available