Paper
12 July 1988 Probing Surfaces With The Atomic Force Microscope
O Marti, B Drake, S Gould, P K Hansma
Author Affiliations +
Proceedings Volume 0897, Scanning Microscopy Technologies and Applications; (1988) https://doi.org/10.1117/12.944502
Event: 1988 Los Angeles Symposium: O-E/LASE '88, 1988, Los Angeles, CA, United States
Abstract
The Atomic Force Microscope can resolve features on conducting or nonconducting surfaces down to the atomic level. The heights of features are recorded as a sharp tip scans over the surface in parallel scans. The interaction between the tip and the surface is the interaction potential between atoms. Individual carbon atoms separated by 0.146 nm have been resolved on graphite. Ordered structure on the "native" oxide of silicon has been observed. Rows of molecules that are separated by 0.5 nm have been resolved in an organic monolayer. The key to the operation of an AFM is the development of a system for sensing tracking forces that are small enough to avoid damaging the surface. The images in this report were obtained by sensing with electron tunneling the deflection 1 - 10 nm) of springs (k 0.1 - 100 N/m) fabricated from silicon oxide or fine wires.
© (1988) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
O Marti, B Drake, S Gould, and P K Hansma "Probing Surfaces With The Atomic Force Microscope", Proc. SPIE 0897, Scanning Microscopy Technologies and Applications, (12 July 1988); https://doi.org/10.1117/12.944502
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Cited by 2 scholarly publications.
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KEYWORDS
Atomic force microscopy

Electrodes

Scanners

Atomic force microscope

Scanning tunneling microscopy

Sensors

Chemical species

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