Scanning Soft X-Ray Microscopy

John A Trail; Robert L Byer

doi:10.1117/12.944544

12 July 1988 Scanning Soft X-Ray Microscopy

John A Trail, Robert L Byer

Proceedings Volume 0897, Scanning Microscopy Technologies and Applications; (1988) https://doi.org/10.1117/12.944544
Event: 1988 Los Angeles Symposium: O-E/LASE '88, 1988, Los Angeles, CA, United States

Abstract

Soft x-ray microscopy allows high resolution imaging of wet biological samples. 100A resolution has been demonstrated with contact microscopy while to date scanning microscopes have achieved 750A resolution. The present state of soft x-ray microscopy is reviewed with emphasis on scanning systems. We compare the various combinations of soft x-ray sources and focusing optics for scanning microscopes and summarize the present performance of the three operating synchrotron / zone plate scanning microscopes. Finally, we describe the SLanford tabletop scanning soft x-ray microscope which uses a laser-produced plasma source with normal incidence mirror focusing optics.

Citation Download Citation

John A Trail and Robert L Byer "Scanning Soft X-Ray Microscopy", Proc. SPIE 0897, Scanning Microscopy Technologies and Applications, (12 July 1988); https://doi.org/10.1117/12.944544

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