New Types Of Scanning Optical Microscopes

G. S. Kino; T. R. Corle; G. Q. Xiao

doi:10.1117/12.968358

1 January 1988 New Types Of Scanning Optical Microscopes

G. S. Kino, T. R. Corle, G. Q. Xiao

Proceedings Volume 0921, Integrated Circuit Metrology, Inspection, and Process Control II; (1988) https://doi.org/10.1117/12.968358
Event: Santa Clara Symposium on Microlithography, 1988, Santa Clara, CA, United States

Abstract

In recent years, there has been a resurgence of interest in light microscopy One reason is the practical development of confocal scanning optical microscopes (CSOMs). CSOMs image twice the spatial frequencies of a conventional microscope, giving them better transverse resolution.1 In addition, they have a shallower depth of focus, meaning out-of-focus portions of the sample are not imaged; this property makes the CSOM ideal for optical sectioning and profiling.2 In this paper, we will describe a new real-time scanning optical microscope (RSOM) capable of operating at 640 frames per second with 5000 lines in the image. The microscope generates a directly observable color image with different depths displayed as different colors. Our real-time CSOM is based on the real-time tandem scanning optical microscope (TSOM) of Petran.3,4 The microscope, however, uses fewer optical components and is mechanically much simpler and easier to align than currently existing scanning optical microscopes or the TSOM. In addition to its speed and simplicity, the microscope maintains all the advantages of conventional CSOMs. We will also describe a number of add-on systems, such as phase-contrast imaging and dark field imaging which we have developed. Many of these ideas were first tried on a standard mechanically scanned CSOM, with the aim of incorporating them into the RSOM.

Citation Download Citation

G. S. Kino, T. R. Corle, and G. Q. Xiao "New Types Of Scanning Optical Microscopes", Proc. SPIE 0921, Integrated Circuit Metrology, Inspection, and Process Control II, (1 January 1988); https://doi.org/10.1117/12.968358

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