Analysis of the thermal effect influence on the MEMS accelerometer sensors measurement results

Aleksander Sawicki; Wojciech Walendziuk

doi:10.1117/12.2248915

28 September 2016 Analysis of the thermal effect influence on the MEMS accelerometer sensors measurement results

Proceedings Volume 10031, Photonics Applications in Astronomy, Communications, Industry, and High-Energy Physics Experiments 2016; 1003120 (2016) https://doi.org/10.1117/12.2248915
Event: Photonics Applications in Astronomy, Communications, Industry, and High-Energy Physics Experiments 2016, 2016, Wilga, Poland

Abstract

In the study the results of the thermal effect influence on the measurements of three different analog accelerometer sensors (ADXL335, ADXL327, LIS344ALH) and one digital sensor (MPU-9255) are presented. The measurement data was registered within the -2°C ÷ 65°C temperature range. The first part of the article characterizes the procedure of determining the acceleration for analog and digital sensors. Moreover, the study includes the methods of determining parameters such as Zero-g Offset and sensitivity. The temperature parameters of the accelerometers, such as Sensitivity change vs. Temperature and Zero-g Offset vs. change Temperature, were also determined. The indicators were determined separately for each of the OX, OY, OZ axes for the investigated MEMS sensors. Finally, the obtained results were compared with the parameters guaranteed by the accelerometric sensor manufacturers.

Citation Download Citation

Aleksander Sawicki and Wojciech Walendziuk "Analysis of the thermal effect influence on the MEMS accelerometer sensors measurement results", Proc. SPIE 10031, Photonics Applications in Astronomy, Communications, Industry, and High-Energy Physics Experiments 2016, 1003120 (28 September 2016); https://doi.org/10.1117/12.2248915

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