Optical Methods Of Measuring Rough Surfaces

K. Leonhardt; K.-H. Rippert; H. J. Tiziani

doi:10.1117/12.949151

21 March 1989 Optical Methods Of Measuring Rough Surfaces

K. Leonhardt, K.-H. Rippert, H. J. Tiziani

Proceedings Volume 1009, Surface Measurement and Characterization; (1989) https://doi.org/10.1117/12.949151
Event: 1988 International Congress on Optical Science and Engineering, 1988, Hamburg, Germany

Abstract

The statistical parameters of surfaces to be measured for industrial applications vary over several orders of magnitude. Surfaces with large slopes or edges are particularly difficult to be recorded. Some measuring methods developed in our laboratory are compared and the range of applications are discussed. For polished and fine ground glass and metal surfaces a heterodyne profilometer with a vertical resolution of 0.5 nm, lateral resolution of 0.6 μm, and large scanning length is discussed. The interferometer can be changed from single- to double-pass operation by rotation of a quarter-wave-plate. For rougher surfaces a profilometer of the photometric-balance type with resolution Rq < 4 nm and dynamic range of 20 μm and an interference microscope with automated fringe evaluation is described. An integral white light roughness sensor covers the roughness range 0.04µm to 10µm and measures independently mean roughness and autocorrelation width.

Citation Download Citation

K. Leonhardt, K.-H. Rippert, and H. J. Tiziani "Optical Methods Of Measuring Rough Surfaces", Proc. SPIE 1009, Surface Measurement and Characterization, (21 March 1989); https://doi.org/10.1117/12.949151

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