In situ observation of ultrafast laser induced micro nano structures using structured light illumination

Alberto Aguilar; Jean-Philippe Colombier; Razvan Stoian; Cyril Mauclair

doi:10.1117/12.2257348

27 March 2017 In situ observation of ultrafast laser induced micro nano structures using structured light illumination

Alberto Aguilar, Jean-Philippe Colombier, Razvan Stoian, Cyril Mauclair

Proceedings Volume 10092, Laser-based Micro- and Nanoprocessing XI; 1009220 (2017) https://doi.org/10.1117/12.2257348
Event: SPIE LASE, 2017, San Francisco, California, United States

Abstract

Ultrafast laser pulses can be used to achieve structuring of surfaces at the micro-nano scale. Under certain irradiation conditions, Laser Induced Periodic Surface Structures (LIPSS) are formed. The LIPSS dimensions range from 100 nm to 2-3 micrometers. The characterization is generally conducted after the laser irradiation by systems such as SEM and/or AFM with a resolution beyond the diffraction limit. In this paper, we use a super resolution microscopy technique based on structured illumination for in-situ observation of the irradiated surface. The LIPSS formation on steel and Si is observed IN-SITU and discussed for a multipulse sequence.

Citation Download Citation

Alberto Aguilar, Jean-Philippe Colombier, Razvan Stoian, and Cyril Mauclair "In situ observation of ultrafast laser induced micro nano structures using structured light illumination", Proc. SPIE 10092, Laser-based Micro- and Nanoprocessing XI, 1009220 (27 March 2017); https://doi.org/10.1117/12.2257348

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available