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The papers in this volume were part of the technical conference cited on the cover and title page. Papers were selected and subject to review by the editors and conference program committee. Some conference presentations may not be available for publication. Additional papers and presentation recordings may be available online in the SPIE Digital Library at SPIEDigitalLibrary.org. The papers reflect the work and thoughts of the authors and are published herein as submitted. The publisher is not responsible for the validity of the information or for any outcomes resulting from reliance thereon. Please use the following format to cite material from these proceedings: Author(s), “Title of Paper,” in International Conference on Micro- and Nano-Electronics 2016, edited by Vladimir F. Lukichev, Konstantin V. Rudenko, Proceedings of SPIE Vol. 10224 (SPIE, Bellingham, WA, 2016) Seven-digit article CID Number. ISSN: 0277-786X ISSN: 1996-756X (electronic) ISBN: 9781510609495 ISBN: 9781510609501 (electronic) Published by SPIE P.O. Box 10, Bellingham, Washington 98227-0010 USA Telephone +1 360 676 3290 (Pacific Time) · Fax +1 360 647 1445 Copyright © 2016, Society of Photo-Optical Instrumentation Engineers. Copying of material in this book for internal or personal use, or for the internal or personal use of specific clients, beyond the fair use provisions granted by the U.S. Copyright Law is authorized by SPIE subject to payment of copying fees. The Transactional Reporting Service base fee for this volume is $18.00 per article (or portion thereof), which should be paid directly to the Copyright Clearance Center (CCC), 222 Rosewood Drive, Danvers, MA 01923. Payment may also be made electronically through CCC Online at copyright.com. Other copying for republication, resale, advertising or promotion, or any form of systematic or multiple reproduction of any material in this book is prohibited except with permission in writing from the publisher. The CCC fee code is 0277-786X/16/$18.00. Printed in the United States of America. Publication of record for individual papers is online in the SPIE Digital Library.
Paper Numbering: Proceedings of SPIE follow an e-First publication model. A unique citation identifier (CID) number is assigned to each article at the time of publication. Utilization of CIDs allows articles to be fully citable as soon as they are published online, and connects the same identifier to all online and print versions of the publication. SPIE uses a seven-digit CID article numbering system structured as follows:
AuthorsNumbers in the index correspond to the last two digits of the seven-digit citation identifier (CID) article numbering system used in Proceedings of SPIE. The first five digits reflect the volume number. Base 36 numbering is employed for the last two digits and indicates the order of articles within the volume. Numbers start with 00, 01, 02, 03, 04, 05, 06, 07, 08, 09, 0A, 0B…0Z, followed by 10-1Z, 20-2Z, etc. Abdullaev, D. A., 1P, 26 Abramov, Igor I., 0V Ageev, Oleg A., 0T, 0U, 1Z Aleksanyan, A. A., 0O Alekseyev, A., 1F Alexeev, A. N., 1T Amirov, Ildar I., 1A Andreev, Dmitrii V., 29 Andreev, Valery G., 06, 07, 08 Andreev, Vladimir V., 29 Antonov, Alexander, 1H Avilov, V. I., 0T Avosopyants, G. V., 2Q, 2R Baklanov, M., 20 Balbekov, A., 18 Bantysh, B. I., 2O Belinsky, L. V., 2Q, 2R Belov, A. N., 04, 1Q Berezkina, Alexandra Yu., 0E Blinov, Yuriy F., 0U Bobkov, S., 18 Bobrinetskiy, Ivan I., 0P, 1G, 1R, 1S Bochkin, G. A., 2E Bogdanov, Yu. I., 2O, 2P, 2Q, 2R Bogdanova, N. A., 2O, 2P, 2Q Bondarev, F., 1B Borshchevskaya, N. A., 2R Borzdov, Andrei V., 0M, 0W Borzdov, Vladimir M., 0M, 0W Boyko, Anton N., 0H Bugaev, A., 0R Bulyarskii, S., 0L Chaly, V. P., 1T Chaplygin, Yu. A., 04, 0K, 1Q Chekmachev, Vadim G., 2I Cherkov, A. G., 0C Chernyaev, A. P., 12 Chernyavskiy, A., 2S, 2T Chesnokov, Yury M., 24 Chkhalo, N. I., 1O Chuev, M., 0B Ciesielski, R., 0L Clemente, Iosif E., 20, 25 Cohn, I. A., 0S Davydov, F., 0M Dedkova, A. A., 28 Degtyarev, S. A., 1L Denisenko, M. V., 2Z Denisenko, M., 1E Denisenko, Yuri I., 0I Djuzhev, N. A., 28 Dolgov, A. N., 1J Doronin, S. I., 2E Dresvyannikov, M. A., 0N, 12 Drosdetsky, M. G., 15 Dubkov, S., 0L Dudin, Alexander A., 05, 0E Duplinskiy, A., 2W Dvurechendkii, A. V., 0D Efremov, A., 1U, 1W Egorchikov, A. E., 1J Egorov, I. V., 1J Elushov, I. V., 14 Emelianov, Aleksei V., 0K, 0P, 1R Eskov, Andrey V., 1Z Ezhova, O., 1B Fadeev, A. V., 2D Fajgar, R., 0D Fastovets, D. V., 2P Fedichkin, Leonid E., 0M, 2L, 2M Fedorova, A. V., 2E Fel’dman, E. B., 2E Filippov, S., 2K Fomchenkov, S. A., 1D Gaev, Dahir S., 0H Galimov, A. M., 14 Gavrilin, I., 1F Gavrilov, Sergey A., 05, 0E, 0H, 0J, 0L Gerasev, S. A., 2F Gergel, V. A., 0X Glukhenkaya, V. B., 0F Glushko, A., 1C Golishnikov, A. A., 04 Golovin, A. V., 1G, 1S Gorbunov, Maxim S., 16, 18 Gornev, E. S., 1I, 1J Gornev, Evgeny S., 1X Gorshkova, N. M., 0X Gromov, D., 0J, 0L, 1F, 1Y Gusev, E. E., 28 Gutshin, Oleg P., 1X Ilin, A. S., 0S Ilin, Oleg I., 0U Ilina, Marina V., 0U Isaeva, A., 1E Jityaev, I. L., 0T Kalmykov, Rustam M., 0H Kalnov, V., 19 Kalugin, Viktor V., 0G Kamaev, G. N., 0D Kanapin, Alan A., 2U, 2W Kargin, Nikolay I., 03, 0Q Karuzskii, A. L., 0N, 0O, 12 Katamadze, K. G., 2N, 2Q, 2R Kateev, Igor Yu., 2H, 2J Kazakov, I. P., 0O Kelm, E. A., 26 Khabibullin, R. A., 0R, 0X Khabutdinov, R., 0M Khamitov, K., 2S Khlybov, A., 27 Khonina, S. N., 1D, 1L, 1M Khorin, I., 07 Kireev, Dmitry M., 0P Kiselev, Dmitrii A., 24 Kitsyuk, E., 0L, 1F Klimin, Viktor S., 0U, 1Z Kochubei, S. A., 0D Kolomejtseva, Natali V., 0V Kolomiytsev, A. S., 0T Komarov, I. A., 1G, 1S Konoplev, B., 10, 1B, 1E Korobova, Natalia E., 0G Koroleva, Olga M., 1A Kostyukov, D. A., 04 Kovalenko, A. G., 0S Kozmin, A., 1Y Kozyukhin, S. A., 0F Krasovitsky, D. M., 1T Kravchenko, Vladislav V., 2A Krayushkina, E., 0Y Krishtop, T. V., 1I Krishtop, Vladimir, 1H, 1I, 1J, 1K Krivyakin, G. K., 0D Kudrya, V., 2C Kulik, S. P., 2N, 2Q Kulyamina, Darya A., 03 Kurenya, Alexey L., 22, 23 Kurochkin, Vladimir L., 2U, 2V Kurochkin, Yuriy V., 2U, 2V, 2W Kuznetsov, Yu. A., 2R Kuznetsova, E. I., 2F Kuznetsova, I. A., 13 Kvasnyy, A. B., 2O Kwon, Kwang-Ho, 1U, 1W Labunov, Vladimir A., 0V Ladunov, Vitalii Y., 2X Lazarenko, P. I., 0F, 1Y Lebedev, E., 1F Lebedev, K., 19 Lee, Junmyung, 1U Lemeshko, S., 1Q Levin, Denis D., 1N Lomov, Andrey A., 24 Lukichev, Vladimir F., 19, 21, 2O, 2P, 2Q Lysenko, I., 1B, 1E Maishev, Yu., 2C Makarchuk, V., 1C Malakhanov, A., 0Y Maltsev, P. P., 0R, 0X Mamaev, V. V., 1T Maniecki, T., 0L Maslovsky, Vladimir M., 29 Matyushkin, Igor V., 1X Melnikov, Alexey A., 2L Meshchaninov, Fedor, 2M Miakonkikh, Andrey V., 19, 1V, 20, 21, 24, 25 Mierczynski, P., 0L Mikhailova, M. S., 0F Mikhaylichenko, S., 1C Miller, Alexander V., 2U Milovanov, R. A., 1P, 26 Minaev, Viktor S., 0G Minkin, V. S., 0X Mischenko, I., 0B Mityagin, Yu. A., 0O, 12 Molchanova, A., 02 Morgunov, A., 1W Murzin, V. N., 0O Naumov, Victor V., 1A Nazarkina, Y. V., 0J Nemtseva, S. Y., 0F Nevolin, Vladimir K., 1N Nikitov, S. A., 0X Novikov, A. V., 1J Orlikovsky, N., 07 Orlov, V. V., 15 Otero, Nerea, 0P Otsuji, T., 0R Ovcharov, Vladimir V., 22, 23 Ozhigov, Yuri I., 2X, 2Y Panchenko, P., 0Y Paporkov, Vladimir A., 09 Paranin, V. D., 1M Patiukov, N., 28 Pavelyev, V. S., 1D Pavlov, A. Yu., 0X Pavlov, A., 05, 0K, 0L Pavlovskiy, V. V., 0X Perestoronin, A. V., 0N, 0O, 12 Petrov, S. I., 1T Petukhov, V., 0K Petukhov, Vladimir A., 2A Pillai, Shreeja, 0A Pisarenko, I. V., 0Z Podlipnov, V. V., 1L Polkovnikov, V. N., 1O Polohin, A. A., 0J Ponomarev, D., 0R Popov, V. G., 1J Prigara, Valeriya P., 22, 23 Priimochenko, V. V., 0N Prokaznikov, Alexander V., 09 Pronin, S., 07 Purkrt, A., 0D Putrya, M. G., 04 Pyatilova, Olga V., 05, 0E, 0H Radkov, A., 0Y Rakitin, Alexander V., 11 Rakitin, Vladimir V., 11 Rana, D. S., 0A Remes, Z., 0D Reshi, Hilal Ahmad, 0A Rezvanov, Askar, 1X Rinnert, H., 0C Rodionov, D., 27 Rogachev, Maxim S., 2J Rogozhin, Alexander E., 02, 07, 19, 1V, 21 Romanov, D. N., 13 Romanova, Irina A., 0V Romashkin, Alexey V., 1N, 1R Romero, Pablo, 0P Rozanov, Roman Yu., 1N Rubtsova, E. I., 1G, 1S Rudakov, Valery I., 0I, 22, 23 Rudenko, Konstantin V., 0M, 19, 1V, 20, 21, 2D Rudenko, M., 2K Ryazanov, R., 1F Rybalka, S., 0Y Ryndin, E. A., 0Z, 10, 1B, 1E Ryzhii, M., 0R Ryzhii, V., 0R Ryzhuk, Roman V., 03 Sablina, Victoria A., 2B Safonov, S. O., 04 Sagunova, I., 1Q Salashchenko, N. N., 1O Saletsky, Alexander M., 06 Satanin, A. M., 2Z Savenko, O. V., 13 Savitskiy, A., 05 Semenikhin, I., 0M, 0R Shabadarova, D., 1W Shabalina, A. S., 1K Shakhnov, V., 1C Shaman, Y. P., 0J Shamanaev, A., 0K Shcherbachev, Kirill D., 24 Shelke, Vilas, 0A Sherchenkov, A. A., 0F, 1Y Shevyakov, V. I., 04, 1Q Shilyaeva, Yulia I., 0E Shklyaev, A. A., 0D Shmelev, S. S., 0O Shostachenko, Stanislav A., 03, 0Q Shuliatyev, A., 05, 1Y Sidorov, F., 02 Sidorov, L. N., 26 Sitnikov, Ivan I., 06 Skorobogatov, A. P., 17 Skovoroda, Nikita A., 2X Smelova, Ekaterina M., 06 Smirnov, Dmitry I., 0E Smirnov, Vladimir A., 0T, 1Z Snigirev, Anatoly A., 21 Sokolov, Alexander S., 2U Sokolov, S. A., 26 Solodovnik, Maxim S., 1Z Stanishevskiy, Yaroslav M., 0Q Stoffel, M., 0C Stolyarov, Alexander A., 29 Stuchlik, J., 0D Stuchliková, T. H., 0D Svintsov, Dmitry, 0M, 2K Sysa, Artem V., 05, 0E, 1F, 1Y Tatarintsev, Andrey A., 07, 19, 1V Teplov, A., 2S Terekhov, V., 1C Tereshonok, D. V., 1I Timoshenkov, Sergey P., 0F, 0G, 0H Timoshenkov, V., 0K, 27 Tominov, Roman V., 1Z Toropov, M. N., 1O Trifonov, A., 0L Trofimov, A. A., 0X Tsarik, K. A., 1R Tskhovrebov, A. M., 0N, 0O Tsukanov, Alexander V., 2G, 2H, 2I, 2J Tsysar, Kseniya M., 06, 08 Uma, B. V., 1D Ustimchik, V., 2W Uvarov, Ilya V., 1A Vaganova, Elena I., 1A Varnavsky, Alexander N., 2B Varnavsky, Andrei N., 2B Vasil’ev, S. G., 2E Vdovin, V. I., 0C Vdovin, Vladimir A., 06, 07, 08 Vergeles, S. S., 1I Vergnat, M., 0C Verhovtseva, A. V., 0X Verma, Payal, 1D, 1L Vishnevskiy, A., 20 Voevodin, V., 2S Voevodin, Vl., 2S Volchkov, N. A., 12 Volodin, V. A., 0C, 0D Vystavkin, A. N., 0S Vyurkov, Vladimir, 0M, 0R, 0W 2K Yachmenev, A., 0R Yadav, Rama Shanker, 0A Yunkin, Vyacheslav A., 21 Zaitsev, Dmitry, 1H Zaitsev, Sergey V., 2V Zakharchenko, Roman V., 03, 0Q Zarev, Ivan S., 09 Zebrev, Gennady I., 0Q, 14, 15, 16 Zelensky, Vladimir S., 06 Zherikhina, L. N., 0N Zhevnenko, D. A., 1I Zhigalov, V., 0K Zinchenko, L., 1C Zubov, D., 1P Zvezdin, Nickolay Yu., 09 Conference CommitteeConference Chairs
Conference Co-Chair International Advisory Committee
Program Committee Chair Co-Chairs
Members
Organizing Committee Chair Co-Chair Members
Local Organizing Committee
Session Chairs
IntroductionThe volume contains selected papers presented at the International Conference “Micro- and Nanoelectronics – 2016” (ICMNE-2016) which has been held in Zvenigirod, Moscow Region, Russia during October 3-7, 2016. ICMNE is a biannual conference covering the main fields of micro- and nanoelectronic technologies and device physics. Since 1992 the Institute of Physics and Technology (Moscow, Russia) is the permanent organizer of ICMNE. From 2003 ICMNE is an SPIE-affiliated conference. ICMNE-2016 included the Extended Session “Quantum Informatics-2016”. The ICMNE-2016 scope contained such scientific and technological fields as micro- and nanoelectronic materials and films, technologies and equipment, metrology, physics and technologies of micro- and nanodevices, simulation and modeling, MEMS and NEMS physics and technology, quantum informatics. ICMNE-2016 included three plenary sessions and 18 topical sessions covering the following areas of focus:
The scientific program was based on invited and contributed papers from the scientists employed at European and Siberian Regions of Russia, Azerbaijan, Belarus, Poland, Germany, France, Korea, Japan, and India. The invited lectures on the current achievements and challenges in the contemporary microelectronics were delivered by the scientists from Germany, Japan, and Russia. The contributions to the sessions of the Conference were made by academic institutions, universities as well as from the industry. More than 100 contributions were discussed at oral presentations; about 120 others were presented as posters. We hope that helpful discussions of these works at the sessions of the Conference and during personal contacts between attendees will promote the research activity in microelectronic community. Additional information about ICMNE-2016 can be found at the conference website http://www.icmne.ftian.ru Vladimir F. Lukichev |
