The features of CNT growth on catalyst-content amorphous alloy layer by CVD-method

S. Dubkov; S. Bulyarskii; A. Pavlov; A. Trifonov; E. Kitsyuk; P. Mierczynski; T. Maniecki; R. Ciesielski; S. Gavrilov; D. Gromov

doi:10.1117/12.2267052

30 December 2016 The features of CNT growth on catalyst-content amorphous alloy layer by CVD-method

S. Dubkov, S. Bulyarskii, A. Pavlov, A. Trifonov, E. Kitsyuk, P. Mierczynski, T. Maniecki, R. Ciesielski, S. Gavrilov, D. Gromov

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Proceedings Volume 10224, International Conference on Micro- and Nano-Electronics 2016; 102240L (2016) https://doi.org/10.1117/12.2267052
Event: The International Conference on Micro- and Nano-Electronics 2016, 2016, Zvenigorod, Russian Federation

Abstract

This work is devoted to the CVD-synthesis of arrays of carbon nanotubes (CNTs) on Co-Zr-N-(O), Ni-Nb-N-(O), Co- Ta-N-(O) catalytic alloy films from gas mixture of C₂H₂+NH₃+Ar at a substrate temperature of about 550°C.Heating of the amorphous alloy causes its crystallization and squeezing of the catalytic metal onto the surface. As a result, small catalyst particles are formed on the surface. The CNT growth takes place after wards on these particles. It should be noted that the growth of CNT arrays on these alloys is insensitive to the thickness of alloy film, which makes this approach technically attractive. In particular, the possibility of local CNT growth at the ends of the Co-Ta-N-(O) film and three-level CNT growth at the end of more complex structure SiO₂/Ni-Nb-N-O/SiO₂/Ni-Nb-N-O/SiO₂/Ni-Nb-N-O/SiO₂ is demonstrated.

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S. Dubkov, S. Bulyarskii, A. Pavlov, A. Trifonov, E. Kitsyuk, P. Mierczynski, T. Maniecki, R. Ciesielski, S. Gavrilov, and D. Gromov "The features of CNT growth on catalyst-content amorphous alloy layer by CVD-method", Proc. SPIE 10224, International Conference on Micro- and Nano-Electronics 2016, 102240L (30 December 2016); https://doi.org/10.1117/12.2267052

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