Micropatterning microlens arrays fabricated by a femtosecond laser wet etch process

Yang Wei; Qing Yang; Hao Bian; Feng Chen

doi:10.1117/12.2257855

28 February 2017 Micropatterning microlens arrays fabricated by a femtosecond laser wet etch process

Yang Wei, Qing Yang, Hao Bian, Feng Chen

Proceedings Volume 10256, Second International Conference on Photonics and Optical Engineering; 102563T (2017) https://doi.org/10.1117/12.2257855
Event: Second International Conference on Photonics and Optical Engineering, 2016, Xi'an, China

Abstract

Microlens arrays with specially required micropatterns are highly desirable for digital optical processors, microimaging systems, optical photolithography as well as various biomedical imaging and detecting applications. However, realization of such devices efficiently remains technically challenging. Here, a facile and efficient route for large-area microlens arrays (MLAs) with programmable micropatterns is demonstrated. The fabrication process involves a femtosecond laser wet etch process combined with the replication process of hot embossing. Special arranged microlens arrays, including a doublet microlens array, a three-microlens group array, a four-microlens group array, and a six-petallike microlens array as examples, were fabricated by this method. The fabricated MLAs exhibit excellent surface morphology quality and optical imaging properties. This presented technique provides an efficient way to flexibly design the size, shape and the arrangement of the MLAs by adjusting the process parameters such as the pulse energy, the number of shots etching time and the distribution of ablation-induced craters and Programming arrangement.

Citation Download Citation

Yang Wei, Qing Yang, Hao Bian, and Feng Chen "Micropatterning microlens arrays fabricated by a femtosecond laser wet etch process", Proc. SPIE 10256, Second International Conference on Photonics and Optical Engineering, 102563T (28 February 2017); https://doi.org/10.1117/12.2257855

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