Excimer Laser In The Kilowatt Range

D. Basting; P. Oesterlin; W. Muckenheim; H.J. Kahlert; U. Brinkmann

doi:10.1117/12.951248

1 June 1989 Excimer Laser In The Kilowatt Range

D. Basting, P. Oesterlin, W. Muckenheim, H.J. Kahlert, U. Brinkmann

Proceedings Volume 1041, Metal Vapor Laser Technology and Applications; (1989) https://doi.org/10.1117/12.951248
Event: OE/LASE '89, 1989, Los Angeles, CA, United States

Abstract

Excimer lasers emitting more than 200 W output power are not commercially available. A significant increase requires new technological efforts with respect to both the gas circulation and the discharge system. A due research project has yielded a laser which emits 0.5 kW at 308 nm when being UV preionized and operated at a repetition rate of 300 Hz. The laser, which is capable of operating at 500 Hz, can be equipped with an X-ray preionization module. After completing this project 1 kW output power will be available.

Citation Download Citation

D. Basting, P. Oesterlin, W. Muckenheim, H.J. Kahlert, and U. Brinkmann "Excimer Laser In The Kilowatt Range", Proc. SPIE 1041, Metal Vapor Laser Technology and Applications, (1 June 1989); https://doi.org/10.1117/12.951248

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