Paper
13 June 2017 Two-dimensional wavefront reconstruction based on double-shearing and least squares fitting
Peiying Liang, Jianping Ding, Yangqing Zhu, Qian Dong, Yuhua Huang, Zhen Zhu
Author Affiliations +
Proceedings Volume 10449, Fifth International Conference on Optical and Photonics Engineering; 104492H (2017) https://doi.org/10.1117/12.2270863
Event: Fifth International Conference on Optical and Photonics Engineering, 2017, Singapore, Singapore
Abstract
The two-dimensional wavefront reconstruction method based on double-shearing and least squares fitting is proposed in this paper. Four one-dimensional phase estimates of the measured wavefront, which correspond to the two shears and the two orthogonal directions, could be calculated from the differential phase, which solves the problem of the missing spectrum, and then by using the least squares method the two-dimensional wavefront reconstruction could be done. The numerical simulations of the proposed algorithm are carried out to verify the feasibility of this method. The influence of noise generated from different shear amount and different intensity on the accuracy of the reconstruction is studied and compared with the results from the algorithm based on single-shearing and least squares fitting. Finally, a two-grating lateral shearing interference experiment is carried out to verify the wavefront reconstruction algorithm based on doubleshearing and least squares fitting.
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Peiying Liang, Jianping Ding, Yangqing Zhu, Qian Dong, Yuhua Huang, and Zhen Zhu "Two-dimensional wavefront reconstruction based on double-shearing and least squares fitting", Proc. SPIE 10449, Fifth International Conference on Optical and Photonics Engineering, 104492H (13 June 2017); https://doi.org/10.1117/12.2270863
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KEYWORDS
Reconstruction algorithms

Wavefront reconstruction

Fourier transforms

Inspection

Interferometry

Numerical simulations

Optical metrology

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