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The shooting accuracy of cluster laser is an important indicator to evaluate the performance of ICF laser devices. By measuring the distribution of the X-ray generated from interaction between the third-harmonic beam and the target, the position information of the third-harmonic beam to the target can be obtained, along with the shooting accuracy. In the beam transmission process, the fundamental, second-harmonic beams and the third-harmonic beams approach to the target at the same time generating spurious X-ray. Based on the radiation fluid, the present paper is to assess the effect of the stray light on the performance of the shooting accuracy. The intensity distribution and power density of the fundamental, second-harmonic and third-harmonic beams at the target position were calculated for the SG-III laser device using SG-99 software. The characteristics of X-ray generated by the different beams radiation are simulated by one-dimensional radiation fluid program MULTI 1D. The results show that the power density of the fundamental, the second-harmonic and third-harmonic beams at the target position are, under the condition of typical shooting precision test (infused fundamental energy of 50J and pulse width is 200ps) 0.28GW / s / cm2 , 0.14GW / s / cm2 , 99GW / s / cm2 , respectively. The X-ray energy intensity radiated from the interaction between the third-harmonic beam and target is 104 times of that from the fundamental, second-harmonic beam. In the current optical system configuration conditions of SG-III laser device, the effects of the fundamental and second-harmonic beams on the target accuracy test can be ignored.
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