Waveguide integration silicon MSM photodetector in silicon nitride-on-SOI platform for visible and NIR wavelength band

Avijit Chatterjee; Shankar Kumar Selvaraja

doi:10.1117/12.2290306

22 February 2018 Waveguide integration silicon MSM photodetector in silicon nitride-on-SOI platform for visible and NIR wavelength band

Avijit Chatterjee, Shankar Kumar Selvaraja

Author Affiliations +

Proceedings Volume 10528, Optical Components and Materials XV; 105280X (2018) https://doi.org/10.1117/12.2290306
Event: SPIE OPTO, 2018, San Francisco, California, United States

Abstract

We propose and demonstrate a Silicon MSM photodetector integrated on Silicon Nitride-on-SOI platform. The demonstration shows the feasibility of an integrated photonic circuit platform in the visible to NIR wavelength with an integrated Silicon photodetector. We present a planarization free oxidation based Silicon Nitride waveguide fabrication on SOI. DC measurements on photo-detectors with the top illumination of 850 nm light observe the best responsivity of 0.1 A/W at 20 V with a dark current of 570 nA.

Conference Presentation

Citation Download Citation

Avijit Chatterjee and Shankar Kumar Selvaraja "Waveguide integration silicon MSM photodetector in silicon nitride-on-SOI platform for visible and NIR wavelength band", Proc. SPIE 10528, Optical Components and Materials XV, 105280X (22 February 2018); https://doi.org/10.1117/12.2290306

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