Design, manufacture, and testing of a silicon nitride ring resonator-based biosensing platform

Michael R. Bryan; Daniel J. Steiner; John S. Cognetti; Benjamin L. Miller

doi:10.1117/12.2304526

16 May 2018 Design, manufacture, and testing of a silicon nitride ring resonator-based biosensing platform

Michael R. Bryan, Daniel J. Steiner, John S. Cognetti, Benjamin L. Miller

Proceedings Volume 10629, Chemical, Biological, Radiological, Nuclear, and Explosives (CBRNE) Sensing XIX; 106290Z (2018) https://doi.org/10.1117/12.2304526
Event: SPIE Defense + Security, 2018, Orlando, FL, United States

Abstract

An effective response to human biowarfare agent exposure events requires the availability of simple, sensitive, reliable, and manufacturable sensing and diagnostic tools. While ring resonators fabricated on a silicon-on-insulator platform have found wide application as enabling components for biosensors, and have even been commercialized successfully, silicon nitride-based ring resonators have received less attention. We hypothesized that silicon nitride would provide both manufacturing and performance advantages over silicon in a biosensing context. To test that hypothesis, we designed a series of silicon nitride ring resonators. Designs were fabricated at the American Institute for Manufacturing Integrated Photonics (AIM Photonics) foundry. We will discuss the design process, optical performance of the manufactured devices, and their use in the label-free detection of biomedically relevant protein targets.

Conference Presentation

Citation Download Citation

Michael R. Bryan, Daniel J. Steiner, John S. Cognetti, and Benjamin L. Miller "Design, manufacture, and testing of a silicon nitride ring resonator-based biosensing platform", Proc. SPIE 10629, Chemical, Biological, Radiological, Nuclear, and Explosives (CBRNE) Sensing XIX, 106290Z (16 May 2018); https://doi.org/10.1117/12.2304526

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