Laser-assisted electrochemical micromachining of mould cavity on the stainless steel surface

Xiaohai Li; Shuming Wang; Dong Wang; Han Tong

doi:10.1117/12.2315481

20 February 2018 Laser-assisted electrochemical micromachining of mould cavity on the stainless steel surface

Xiaohai Li, Shuming Wang , Dong Wang, Han Tong

Proceedings Volume 10697, Fourth Seminar on Novel Optoelectronic Detection Technology and Application; 1069750 (2018) https://doi.org/10.1117/12.2315481
Event: Fourth Seminar on Novel Optoelectronic Detection Technology and Application, 2017, Nanjing, China

Abstract

In order to fabricate the micro mould cavities with complex structures on 304 stainless steel, laser-assisted electrochemical micromachining (EMM) based on surface modification by fiber laser masking was studied,and a new device of laser-assisted EMM was developed. Laser marking on the surface of 304 stainless steel can first be realized by fiber laser heating scanning. Through analysis of X ray diffraction analysis (XRD), metal oxide layer with predefined pattern can be formed by laser marking, and phase transformation can also occur on the 304 stainless steel surface, which produce the laser masking layer with corrosion resistance. The stainless steel surface with laser masking layer is subsequently etched by EMM, the laser masking layer severs as the temporary protective layer without relying on lithography mask, the fabrication of formed electrodes is also avoided, so micro pattern cavities can fast be fabricated. The impacts on machining accuracy during EMM with laser masking were discussed to optimize machining parameters, such as machining voltage, electrolyte concentration, duty cycle of pulse power supply and electrode gap size, the typical mould cavities 23μm deep were fabricated under the optimized parameters.

Citation Download Citation

Xiaohai Li, Shuming Wang , Dong Wang, and Han Tong "Laser-assisted electrochemical micromachining of mould cavity on the stainless steel surface", Proc. SPIE 10697, Fourth Seminar on Novel Optoelectronic Detection Technology and Application, 1069750 (20 February 2018); https://doi.org/10.1117/12.2315481

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available