Multiwavelength digital holography: height measurements on linearly moving and rotating objects

Annelie Schiller; Tobias Beckmann; Markus Fratz; Alexander Bertz; Daniel Carl; Karsten Buse

doi:10.1117/12.2319938

7 September 2018 Multiwavelength digital holography: height measurements on linearly moving and rotating objects

Annelie Schiller, Tobias Beckmann, Markus Fratz, Alexander Bertz, Daniel Carl, Karsten Buse

Proceedings Volume 10834, Speckle 2018: VII International Conference on Speckle Metrology; 108342E (2018) https://doi.org/10.1117/12.2319938
Event: SPECKLE 2018: VII International Conference on Speckle Metrology, 2018, Janów Podlaski, Poland

Abstract

Multiwavelength digital holography enables precise and fast 3D height measurements of rough surfaces. To inspect objects during motion would enlarge the range of applications enormously. In this work the limits of this technique with respect to velocity and inclination angles are studied for linearly moving as well as for rotating objects. We demonstrate measurements on surfaces with inclination angles of up to 40° , moving linearly with a velocity of 2 mm/s, providing 2 μm accuracy, and on a rotating cylinder with circumferential speed of 10 mm/s, we achieve 1.1 μm precision. All measurements are conducted with less than 1 mW of continuous-wave laser light, so the object moves several micrometers during exposure time.

Citation Download Citation

Annelie Schiller, Tobias Beckmann, Markus Fratz, Alexander Bertz, Daniel Carl, and Karsten Buse "Multiwavelength digital holography: height measurements on linearly moving and rotating objects", Proc. SPIE 10834, Speckle 2018: VII International Conference on Speckle Metrology, 108342E (7 September 2018); https://doi.org/10.1117/12.2319938

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