Micro-scanning mechanism design based on dynamic model

Li-wei Huang; Guang-li Sun; Jiang-peng Song; Shi-xun Fan

doi:10.1117/12.2505166

12 December 2018 Micro-scanning mechanism design based on dynamic model

Li-wei Huang, Guang-li Sun, Jiang-peng Song, Shi-xun Fan

Proceedings Volume 10848, Micro-Optics and MOEMS; 1084809 (2018) https://doi.org/10.1117/12.2505166
Event: International Symposium on Optoelectronic Technology and Application 2018, 2018, Beijing, China

Abstract

Micro-Scanning Mechanism (MSM) is the important component of super-resolution imaging/stabilization system. Through the MSM, the resolution of the infrared imaging system can be improved without increasing the total number of detection elements of the infrared focal plane detector, extending the working distance of the thermal imaging system and eliminating the detection blind zone caused by the small filling factor of the detector. This work was focused on the model-based design method of MSM, in order to improve the design efficiency and reduce design costs. The dynamic model of MSM was established, and the MSM design method based on this model was proposed. The structure and working principle of MSM were introduced, and the high-order resonance and axial coupling of MSM were analyzed. Based on this model, the main parameters of a certain MSM were designed. The simulation results meet the design requirements, effectively improving the design efficiency and reducing the design cost.

Citation Download Citation

Li-wei Huang, Guang-li Sun, Jiang-peng Song, and Shi-xun Fan "Micro-scanning mechanism design based on dynamic model", Proc. SPIE 10848, Micro-Optics and MOEMS, 1084809 (12 December 2018); https://doi.org/10.1117/12.2505166

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
7 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Model-based design

Sensors

Imaging systems

Performance modeling

Image resolution

Infrared imaging

Infrared sensors

Show All Keywords

Keywords/Phrases

Search In:

Publication Years