Femtosecond laser-based formation of electrically conductive silicon carbide on PDMS

Yasutaka Nakajima; Shuichiro Hayashi; Akito Katayama; Nikolay N. Nedyalkov; Mitsuhiro Terakawa

doi:10.1117/12.2506486

4 March 2019 Femtosecond laser-based formation of electrically conductive silicon carbide on PDMS

Yasutaka Nakajima, Shuichiro Hayashi, Akito Katayama, Nikolay N. Nedyalkov, Mitsuhiro Terakawa

Proceedings Volume 10908, Frontiers in Ultrafast Optics: Biomedical, Scientific, and Industrial Applications XIX; 1090804 (2019) https://doi.org/10.1117/12.2506486
Event: SPIE LASE, 2019, San Francisco, California, United States

Abstract

We experimentally demonstrated formation of electrically conductive structures by modifying native polydimethylsiloxane (PDMS) with femtosecond laser. By irradiating femtosecond laser pulses to native PDMS, black structures with electrical conductivity were formed. Analyses using X-ray diffraction (XRD) show that the formed structures were composed of β-silicon carbide (β-SiC). Our technique enables the spatially selective formation of β-SiC on the surface of PDMS, leading to open a novel route to develop a simple method to fabricate flexible or stretchable MEMS devices with SiC microstructures.

Citation Download Citation

Yasutaka Nakajima, Shuichiro Hayashi, Akito Katayama, Nikolay N. Nedyalkov, and Mitsuhiro Terakawa "Femtosecond laser-based formation of electrically conductive silicon carbide on PDMS", Proc. SPIE 10908, Frontiers in Ultrafast Optics: Biomedical, Scientific, and Industrial Applications XIX, 1090804 (4 March 2019); https://doi.org/10.1117/12.2506486

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