Metrology for and with nanooptics (Conference Presentation)

Thomas Pertsch

doi:10.1117/12.2534351

2 August 2019 Metrology for and with nanooptics (Conference Presentation)

Thomas Pertsch

Proceedings Volume 11057, Modeling Aspects in Optical Metrology VII; 1105704 (2019) https://doi.org/10.1117/12.2534351
Event: SPIE Optical Metrology, 2019, Munich, Germany

Abstract

This Conference Presentation, “Metrology for and with nanooptics,” was recorded at SPIE Optical Metrology 2019, held in Munich, Germany.

Conference Presentation

Citation Download Citation

Thomas Pertsch "Metrology for and with nanooptics (Conference Presentation)", Proc. SPIE 11057, Modeling Aspects in Optical Metrology VII, 1105704 (2 August 2019); https://doi.org/10.1117/12.2534351

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