Investigation on damage process of indium tin oxide film induced by 1064nm quasi-CW laser

Liping Peng; Yuan'an Zhao; Xiaofeng Liu; Zhaoliang Cao; Jianda Shao; Ruijin Hong; Chunxian Tao; Dawei Zhang; Xi Wang

doi:10.1117/12.2540821

8 July 2019 Investigation on damage process of indium tin oxide film induced by 1064nm quasi-CW laser

Liping Peng, Yuan'an Zhao, Xiaofeng Liu, Zhaoliang Cao, Jianda Shao, Ruijin Hong, Chunxian Tao, Dawei Zhang, Xi Wang

Proceedings Volume 11063, Pacific Rim Laser Damage 2019: Optical Materials for High-Power Lasers; 1106302 (2019) https://doi.org/10.1117/12.2540821
Event: Pacific Rim Laser Damage 2019 and Thin Film Physics and Applications 2019, 2019, Qingdao, China

Abstract

Quasi-CW laser damage process of indium tin oxide (ITO) thin film was investigated. The ITO film with thickness of 300 nm was deposited on fused silica substrate by magnetron sputtering. Experiments were conducted on quasi-CW laser with wavelength of 1064 nm, and the test was executed in single shot test with radiation time of 60 s. The damage morphologies were observed via optical microscope and scanning electron microscope (SEM). The apparent damage started with change in color which the morphologies were visible to the naked eyes. With the power density higher than the laser induced damage threshold (LIDT), there were cracks in the center of the damage site. The temperature distribution of the ITO thin film was investigated based on the heat equation.

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Liping Peng, Yuan'an Zhao, Xiaofeng Liu, Zhaoliang Cao, Jianda Shao, Ruijin Hong, Chunxian Tao, Dawei Zhang, and Xi Wang "Investigation on damage process of indium tin oxide film induced by 1064nm quasi-CW laser", Proc. SPIE 11063, Pacific Rim Laser Damage 2019: Optical Materials for High-Power Lasers, 1106302 (8 July 2019); https://doi.org/10.1117/12.2540821

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