Automatic Determination Of Regular-Grid Distribution Of Fringe Order In Interference Images

Aleksander Sokolowski

doi:10.1117/12.961265

3 April 1989 Automatic Determination Of Regular-Grid Distribution Of Fringe Order In Interference Images

Aleksander Sokolowski

Proceedings Volume 1121, Interferometry '89; (1989) https://doi.org/10.1117/12.961265
Event: Interferometry '89, 1989, Warsaw, Poland

Abstract

A computerized method of obtaining distribution of fringe order in points of regular grid from a skeletonized interferogram is prezented. This procedure is based on special algorithm of interpolation, named here as the quasi-gradient double-parabola method (OGP-method). This method is an improvement of the double-parabola method (DP-method). The procedure can be utilized as a subprogram in automated interpretation of interference images in different methods of optical metrology. The procedure can operate on microcomputers IBM PC/AT and compatible ones.

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Aleksander Sokolowski "Automatic Determination Of Regular-Grid Distribution Of Fringe Order In Interference Images", Proc. SPIE 1121, Interferometry '89, (3 April 1989); https://doi.org/10.1117/12.961265

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KEYWORDS

Fringe analysis

Holographic interferometry

Chlorine

Interferometry

Optical metrology

Physics

Polishing

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