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2 March 2020 Multiline oscillation of Q-switched cavity-dumped CO2 laser with intracavity diffraction grating
Yuzuru Tadokoro, Tatsuya Yamamoto, Junichi Nishimae
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Proceedings Volume 11266, Laser Resonators, Microresonators, and Beam Control XXII; 1126613 (2020) https://doi.org/10.1117/12.2542631
Event: SPIE LASE, 2020, San Francisco, California, United States
Abstract
Extreme-ultraviolet (EUV) lithography employs a high-power short-pulse carbon dioxide (CO2) laser based on master oscillator power amplifier architecture to produce Sn plasma generating the EUV light. We demonstrate multiline oscillation of a CO2 laser with 20 ns of pulse duration for the master oscillator. An intracavity diffraction grating enables the 5-line oscillation (10.55, 10.57, 10.59, 10.61, and 10.63 μm) by separating the different 5 lines spatially in a gasdischarge gain medium. The multiline CO2 laser employs a cavity length of 3000 mm and an electro-optically Q-switched cavity dumping to generate 20-ns laser pulses. The maximum output power is 10.6 W at 100-kHz repetition rate and the output stability is ±1.2% at 3σ over 30 minutes. The grating combines the separated 5 optical axes into one optical axis inside the cavity, which realizes the nearly single-mode (TEM00) oscillation with ~1.1 of M2.
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Yuzuru Tadokoro, Tatsuya Yamamoto, and Junichi Nishimae "Multiline oscillation of Q-switched cavity-dumped CO2 laser with intracavity diffraction grating", Proc. SPIE 11266, Laser Resonators, Microresonators, and Beam Control XXII, 1126613 (2 March 2020); https://doi.org/10.1117/12.2542631
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KEYWORDS
Diffraction gratings
Carbon dioxide lasers
Extreme ultraviolet
Oscillators
Pulsed laser operation
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