CONFERENCE PROCEEDINGS
Advanced Search
Home > Proceedings > Volume 11279 > Article
Paper
2 March 2020 Performance enhancement of quantum dot infrared photodetector by periodic pillar array
Taizo Shibuya, Yuichi Igarashi, Masahiro Kakuda, Yoshihiro Kitagawa, Tetsuro Satoh, Tomo Tanaka, Akinobu Shibuya, Masayuki Shirane, Yasuhiko Arakawa
Author Affiliations +
Proceedings Volume 11279, Terahertz, RF, Millimeter, and Submillimeter-Wave Technology and Applications XIII; 1127907 (2020) https://doi.org/10.1117/12.2543164
Event: SPIE OPTO, 2020, San Francisco, California, United States
Abstract
In this paper, we report enhanced performance of quantum dot infrared photodetector (QDIP) by means of surface plasmonic structure. A 10-layer InGaAs quantum dot (QD) structure with AlGaAs barriers were grown on GaAs(001) substrate by molecular beam epitaxy. A periodic gold pillar array was fabricated on the surface of the wafer by i-line lithography and ICP dry etching. The wafer was processed to form a circular mesa of 300 μm diameter. The pillar pitch was varied from 2.0 to 2.5 μm and the pillar diameter was varied from 1.1 to 1.6 μm. The detectors were illuminated from substrate side to evaluate spectral responsivity and detectivity D* at temperature T = 78 K. The pillar array was found to enhance the detector performance at particular wavelength which depends on the pillar property. We found the optimal property of the pillar array whose enhancement peak matches the QDIP's response peak at 7.7 μm. At that wavelength, the responsivity and detectivity were almost doubled compared to the detector without the pillar array.
© (2020) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Citation Download Citation
Taizo Shibuya, Yuichi Igarashi, Masahiro Kakuda, Yoshihiro Kitagawa, Tetsuro Satoh, Tomo Tanaka, Akinobu Shibuya, Masayuki Shirane, and Yasuhiko Arakawa "Performance enhancement of quantum dot infrared photodetector by periodic pillar array", Proc. SPIE 11279, Terahertz, RF, Millimeter, and Submillimeter-Wave Technology and Applications XIII, 1127907 (2 March 2020); https://doi.org/10.1117/12.2543164
ACCESS THE FULL ARTICLE
ORGANIZATIONAL
Sign in with credentials provided by your organization.
INSTITUTIONAL
Select your institution to access the SPIE Digital Library.
SELECT YOUR INSTITUTION
PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.
PERSONAL SIGN IN
No SPIE Account? Create one
PURCHASE THIS CONTENT
SUBSCRIBE TO DIGITAL LIBRARY
50 downloads per 1-year subscription
Members: $195
Non-members: $335 ADD TO CART
25 downloads per 1 - year subscription
Members: $145
Non-members: $250 ADD TO CART
PURCHASE SINGLE ARTICLE
Includes PDF, HTML & Video, when available
Members: $17.00
Non-members: $21.00 ADD TO CART
PROCEEDINGS
 6 PAGES
DOWNLOAD PAPER SAVE TO MY LIBRARY
GET CITATION
Advertisement
Advertisement
RIGHTS & PERMISSIONS
Get copyright permission  Get copyright permission on Copyright Marketplace
KEYWORDS
Sensors
Photodetectors
Quantum dots
Infrared detectors
RELATED CONTENT
Subscribe to Digital Library
Receive Erratum Email Alert
Back to Top