Design and fabrication of tunable inductors based on vanadium dioxide thin film

Eunsung Shin; Liangyu Li; Kuan-Chang Pan; Guru Subramanyam

doi:10.1117/12.2536937

6 December 2019 Design and fabrication of tunable inductors based on vanadium dioxide thin film

Eunsung Shin, Liangyu Li, Kuan-Chang Pan, Guru Subramanyam

Proceedings Volume 11371, International Workshop on Thin Films for Electronics, Electro-Optics, Energy, and Sensors 2019; 113710A (2019) https://doi.org/10.1117/12.2536937
Event: International Workshop on Thin Films for Electronics, Electro-Optics, Energy and Sensors, 2019, Reykjavik, Iceland

Abstract

Vanadium dioxide (VO₂) is a well-known phase change material that shows a metal to insulator transition at temperatures near 68 °C. It has many potential applications in science and engineering. In this study, VO₂ thin film based planar spiral tunable inductors were designed and fabricated on a sapphire substrate. This approach can be a potential solution for reconfigurable RF/microwave wireless communication systems. According to the experimental results, fabricated inductors show a 43.4 % (from 2.19 nH to 1.24 nH) tuning range at 2 GHz when the VO₂ thin film layer undergoes the insulator-to-metal transition from room temperature to temperatures above the transition. This result confirms that the proposed inductor structure was fully functional with the successful inductance tuning capability.

Citation Download Citation

Eunsung Shin, Liangyu Li, Kuan-Chang Pan, and Guru Subramanyam "Design and fabrication of tunable inductors based on vanadium dioxide thin film", Proc. SPIE 11371, International Workshop on Thin Films for Electronics, Electro-Optics, Energy, and Sensors 2019, 113710A (6 December 2019); https://doi.org/10.1117/12.2536937

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