The Sputter Deposition Of Metal Multilayers

R. E. Somekh; W. C. Shih; K. Dyrbye; K. H. Huang; C. S. Baxter

doi:10.1117/12.961863

27 November 1989 The Sputter Deposition Of Metal Multilayers

R. E. Somekh, W. C. Shih, K. Dyrbye, K. H. Huang, C. S. Baxter

Proceedings Volume 1140, X-Ray Instrumentation in Medicine and Biology, Plasma Physics, Astrophysics, and Synchrotron Radiation; (1989) https://doi.org/10.1117/12.961863
Event: 1989 International Congress on Optical Science and Engineering, 1989, Paris, France

Abstract

We consider several different types of sputtered metal multilayers from a materials science point of view. By studying different classes of multilayer (single crystal, microcrystalline and amorphous) we aim to show that a broad insight into the relationship of the sputtering conditions to the microstructural features and properties of the multilayers can be developed. Our major objective is to establish the way features of the layers on an atomic scale relate to the sputter deposition conditions and the mobility of the atoms as they are deposited. A number of multilayers are discussed which range over many types of atomic order: from the perfect single crystal multilayers of Cu/Ni and Nb/Ta, through microcrystalline structures of Ti/W to the mixed multilayer of amorphous Si with microcrystalline W and finally the fully amorphous multilayer of NiZr/NiHf. By looking at a series of fundamentally different multilayers all made in the same deposition systems it is hoped to eliminate the problem of deposition system dependent parameters such as base pressures and degrees of control. The main conclusion is that whilst single crystal multilayers rely on thermal energy to maintain flatness, amorphous and microcrystalline multilayers benefit enormously from bombardment by ions and atoms with energies in the region of 30-50eV.

Citation Download Citation

R. E. Somekh, W. C. Shih, K. Dyrbye, K. H. Huang, and C. S. Baxter "The Sputter Deposition Of Metal Multilayers", Proc. SPIE 1140, X-Ray Instrumentation in Medicine and Biology, Plasma Physics, Astrophysics, and Synchrotron Radiation, (27 November 1989); https://doi.org/10.1117/12.961863

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available