A novel 3D traceable optical beam detection system designed for probe-scanning metrological AFM

Shasha Xiao; Nianhang Lu; Rui Zhang; Sen Wu

doi:10.1117/12.2550292

12 March 2020 A novel 3D traceable optical beam detection system designed for probe-scanning metrological AFM

Shasha Xiao, Nianhang Lu, Rui Zhang, Sen Wu

Proceedings Volume 11434, 2019 International Conference on Optical Instruments and Technology: Optical Systems and Modern Optoelectronic Instruments; 114341K (2020) https://doi.org/10.1117/12.2550292
Event: 2019 International Conference on Optical Instruments and Technology, 2019, Beijing, China

Abstract

Metrological AFM (mAFM) has high-resolution three-dimensional measurement capability, and its measurement results can be traced back to the SI. Most of mAFMs utilize the optical beam deflection (OBD) method to detect the deflection of cantilever probe, which has simple structure and high sensitivity. A novel 3D traceable OBD system was designed based on the flatbed scanner. In the design, the propagation direction of the laser beam can always be parallel to the motion direction of the scanner so that the relative positions of the laser focal spot and the cantilever probe remain unchanged in any scanning range. All the scanners in the X, Y, Z directions are connected in series, and their motion directions are strictly orthogonal without mutual coupling. The application of the compensation scanner achieves the synchronous movement of the aspherical lens and the Z-direction scanner, which avoids the defocusing phenomenon of the cantilever probe during the large-stroke scanning with the Z-direction scanner. A series of experiments were performed to evaluate the proposed design, including the measurement of the laser tracking errors caused by the scanner motion and imaging results of a standard grid under contact mode. The results demonstrated the imaging capabilities of this system.

Citation Download Citation

Shasha Xiao, Nianhang Lu, Rui Zhang, and Sen Wu "A novel 3D traceable optical beam detection system designed for probe-scanning metrological AFM", Proc. SPIE 11434, 2019 International Conference on Optical Instruments and Technology: Optical Systems and Modern Optoelectronic Instruments, 114341K (12 March 2020); https://doi.org/10.1117/12.2550292

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KEYWORDS

Scanners

3D scanning

Atomic force microscopy

Aspheric lenses

Laser scanners

Laser beam diagnostics

Mirrors

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