Presentation
15 December 2020 Ultra-low noise TES bolometer arrays for the US SAFARI contribution
Author Affiliations +
Abstract
We are developing ultra-low noise transition edge sensor (TES) bolometer arrays for the long-wavelength grating spectrometer modules of SAFARI, part of the cryogenically-cooled SPICA mission now in phase-A study in Europe.  These devices target a per-pixel noise equivalent power (NEP) below 10^-19 WHz^-1/2 with a time-constant faster than 10ms.  The SAFARI focal planes will be cooled to 50 mK, and we use a 100 mK thermistor formed from an annealed Titanium-Gold bilayer film.  To minimize excess heat capacity, we have developed a new wet-release process which provides high yield in large (~250-pixel) sub-arrays.  We will report on the fabrication, testing, and achieved performance of these detectors. We will also present the focal plane assembly designed to support the 5 (spatial) x 180 (spectral) format coupled to spectrometers thru multimodes horns.  The focal plane is composed of four monolithic sub-arrays with integrated backshorts, all integrated onto a large silicon substrate.
Conference Presentation
© (2020) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Roger C. O'Brient, Charles M. Bradford, Matthew Kenyon, Hien Nguyen, Howard Hui, Pierre Echternach, Gert de Lange, Damian Audley, and Jan van der Kuur "Ultra-low noise TES bolometer arrays for the US SAFARI contribution", Proc. SPIE 11453, Millimeter, Submillimeter, and Far-Infrared Detectors and Instrumentation for Astronomy X, 114531L (15 December 2020); https://doi.org/10.1117/12.2563116
Advertisement
Advertisement
KEYWORDS
Bolometers

Optical fabrication

Sensors

Silicon

Spectroscopy

Sensor performance

Back to Top