Simulation research on scattering characteristics of incident electron under uniform doping of EBCMOS substrate

Wei Wang; Ye Li; De Song; Xulei Qin

doi:10.1117/12.2565274

17 April 2020 Simulation research on scattering characteristics of incident electron under uniform doping of EBCMOS substrate

Wei Wang, Ye Li, De Song, Xulei Qin

Author Affiliations +

Proceedings Volume 11455, Sixth Symposium on Novel Optoelectronic Detection Technology and Applications; 114556K (2020) https://doi.org/10.1117/12.2565274
Event: Sixth Symposium on Novel Photoelectronic Detection Technology and Application, 2019, Beijing, China

Abstract

According to the interaction model between low-energy electrons and solids, combined with Monte Carlo calculation method, MATLAB software was used to simulate the electron scattering trajectories of a large number of photoelectrons incident on EBCMOS substrates. The energy loss rate of different incident photoelectrons on the substrate was analyzed. The influence of electron incidence depth and the range of electron motion. When the incident photoelectron energy increases, the energy loss rate gradually decreases, and the electron incident depth and the electron motion range increase. The simulation results can provide reference and basis for the design and preparation of the back-illuminated CMOS device substrate.

Citation Download Citation

Wei Wang, Ye Li, De Song, and Xulei Qin "Simulation research on scattering characteristics of incident electron under uniform doping of EBCMOS substrate", Proc. SPIE 11455, Sixth Symposium on Novel Optoelectronic Detection Technology and Applications, 114556K (17 April 2020); https://doi.org/10.1117/12.2565274

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available