Acoustic Microscropy As A Diagnostic Tool For CVD Diamond Films

A. Koumvakalis; R. C. Addison Jr.

doi:10.1117/12.962066

15 January 1989 Acoustic Microscropy As A Diagnostic Tool For CVD Diamond Films

A. Koumvakalis, R. C. Addison Jr.

Proceedings Volume 1146, Diamond Optics II; (1989) https://doi.org/10.1117/12.962066
Event: 33rd Annual Technical Symposium, 1989, San Diego, United States

Abstract

Using acoustic microscopy, we have examined polycrystalline diamond films grown by the CVD process on silicon substrates. This technique enables nondestructive characterization of these films with regard to their grain size, stress patterns and boundary anomalies between the film and the substrate. We have used a scanning acoustic microscope (SAM) to characterize several diamond films grown on silicon substrates at Crystallume and at ASTEX Co. The film thicknesses ranged from 1 μm to 100 μm with nominal grain sizes from 0.3 to 8 μm. Results will be presented showing various microstructural features in the films.

Citation Download Citation

A. Koumvakalis and R. C. Addison Jr. "Acoustic Microscropy As A Diagnostic Tool For CVD Diamond Films", Proc. SPIE 1146, Diamond Optics II, (15 January 1989); https://doi.org/10.1117/12.962066

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