Paper
9 November 1989 Liquid Transport In Micron And Submicron Channels
L. J. Kricka, P. Wilding, J. Pfahler, J. Harley, H. Bau, J. N. Zemel
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Abstract
There has been a growth of interest in fluid transport in very small structures. The basis for this interest derives from the application of micromachining technology to problems in fluidics. Several aspects of this problem are reviewed and discussed including some of our recent research on this topic. The problems discussed may be separated into those dealing with biological systems and those that explore the applicability of the macroscopic Navier-Stokes equations to very small planar channels. In the work conducted at the University of Pennsylvania, an experimental investigation of fluid flow in extremely small channels was conducted. Three devices have been constructed with channels of rectangular cross-section ranging in area from 7200 to 80 square microns. It was found that in the relatively large flow channels that the experimental observations were in rough agreement with the predictions from the Navier-Stokes equations. However, in the smallest of the chan-nels, there was a significant deviation from the Navier-Stokes predictions.
© (1989) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
L. J. Kricka, P. Wilding, J. Pfahler, J. Harley, H. Bau, and J. N. Zemel "Liquid Transport In Micron And Submicron Channels", Proc. SPIE 1167, Precision Engineering and Optomechanics, (9 November 1989); https://doi.org/10.1117/12.962937
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CITATIONS
Cited by 115 scholarly publications and 24 patents.
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KEYWORDS
Liquids

Microfluidics

Silicon

Optomechanical design

Glasses

Manufacturing

Semiconducting wafers

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