Towards AR waveguides with refractive index 2.0 utilizing nanoimprint lithogrpahy

Martin Eibelhuber; Christine Thanner; Dominik Treiblmayr; Sebastien Pochon; W. Frost; Joao Ferreira; David Pearson; Stephanie Baclet

doi:10.1117/12.2579505

29 March 2021 Towards AR waveguides with refractive index 2.0 utilizing nanoimprint lithogrpahy

Martin Eibelhuber, Christine Thanner, Dominik Treiblmayr, Sebastien Pochon, W. Frost, Joao Ferreira, David Pearson, Stephanie Baclet

Author Affiliations +

Proceedings Volume 11765, Optical Architectures for Displays and Sensing in Augmented, Virtual, and Mixed Reality (AR, VR, MR) II; 117650H (2021) https://doi.org/10.1117/12.2579505
Event: SPIE AR VR MR, 2021, Online Only

Abstract

Augmented reality glassed based on waveguides with diffraction gratings are the technology of choice for many device makers. They have evolved to provide excellent picture quality and large field of view to the users. However, the field of view is a key criterion for such waveguides and to further increase it the refractive index of the used materials has to be increased. With current manufacturing methods mostly nanoimprinted permanent polymers with inorganic high refractive nanoparticles are used. Commercial materials can already achieve refractive index of n=1.9 but it seems difficult to achieve refractive indices of n=2.0 and above. On the other side the glass substrates or coating are already available with a refractive index n=2.0 and higher and thus could be utilized directly for structuring the needed diffraction gratings. In this case a pattern transfer by etching is required which should enable binary grating designs as well as slanted grating. In this work the nanoimprint lithography patterning is investigated in combination with subsequent etching processes to achieve binary or slanted nanograting in high refractive TiO2 and glasses.

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Martin Eibelhuber, Christine Thanner, Dominik Treiblmayr, Sebastien Pochon, W. Frost, Joao Ferreira, David Pearson, and Stephanie Baclet "Towards AR waveguides with refractive index 2.0 utilizing nanoimprint lithogrpahy", Proc. SPIE 11765, Optical Architectures for Displays and Sensing in Augmented, Virtual, and Mixed Reality (AR, VR, MR) II, 117650H (29 March 2021); https://doi.org/10.1117/12.2579505

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