Rapid microfabrication of helical structures for industrial applications

He Cheng; Pooria Golvari; Chun Xia; Mingman Sun; Meng Zhang; Stephen M. Kuebler; Xiaoming Yu

doi:10.1117/12.2608940

5 March 2022 Rapid microfabrication of helical structures for industrial applications

He Cheng, Pooria Golvari, Chun Xia, Mingman Sun, Meng Zhang, Stephen M. Kuebler, Xiaoming Yu

Proceedings Volume 12012, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XV; 1201205 (2022) https://doi.org/10.1117/12.2608940
Event: SPIE OPTO, 2022, San Francisco, California, United States

Abstract

Helical structures exhibit novel optical and mechanical properties and are commonly used in different fields such as metamaterials and microfluidics. A few methods exist for fabricating helical microstructures, but none of them has the throughput or flexibility required for patterning large surface areas with tunable pitch. In this paper, we report a method for fabricating helical structures with high-throughput and adjustable form based on multiphoton polymerization (MPP) using single-exposure, three-dimensionally structured, self-accelerating, axially tunable light-fields. The light-fields are generated as a superposition of high-order Bessel modes and have a closed-form expression relating the design of the phase mask to the rotation rate of the beam. The method is used to fabricate helices with different pitches and handedness in the material SU-8. Beam splitting and galvo-scanning can be implemented in the system. The fabrication of helical matrices is demonstrated. Compared to point-by-point scanning, our method increases the fabrication speed by two orders of magnitude, paving the way for adopting MPP for mass production of functional devices in many industrial applications.

Citation Download Citation

He Cheng, Pooria Golvari, Chun Xia, Mingman Sun, Meng Zhang, Stephen M. Kuebler, and Xiaoming Yu "Rapid microfabrication of helical structures for industrial applications", Proc. SPIE 12012, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XV, 1201205 (5 March 2022); https://doi.org/10.1117/12.2608940

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