Measurement to local phase modulation of LCSLM using multi-region synchronous processing of carrier interference fringe

Fuzhong Bai; Jiwei Lang; Jiayi Chen; Jianxin Wang; Yongxiang Xu

doi:10.1117/12.2604830

13 December 2021 Measurement to local phase modulation of LCSLM using multi-region synchronous processing of carrier interference fringe

Fuzhong Bai, Jiwei Lang, Jiayi Chen, Jianxin Wang, Yongxiang Xu

Author Affiliations +

Proceedings Volume 12071, 10th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing and Metrology Technologies; 120710I (2021) https://doi.org/10.1117/12.2604830
Event: Tenth International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2021), 2021, Chengdu, China

Abstract

In order to measure the local phase modulation characteristic of a phase-only reflective Liquid crystal spatial light modulator (LCSLM) and accurately evaluate the nonuniformity of phase modulation, a Twyman-Green interferometer is built to simultaneously measure the local phase modulation of multi-region in LCSLM. A series of carrier fringe patterns can be captured, which is modulated by the local control pattern loaded to the LCSLM. The phase distribution from all fringe patterns are extracted respectively with the Fourier transform method. By calculating the variance values of all phase values in each pixel position, a phase variance matrix is obtained. Then the regions of interests (ROIs) from the fringe pattern are extracted with the Otsu segmentation algorithm and the connected region labeling algorithm. At last, the phase modulation of local regions is obtained synchronously with the phase-shift algorithm based on Fourier transform method. The proposed method can greatly improve the measuring efficiency and reduce the environmental impact to great degree.

Citation Download Citation

Fuzhong Bai, Jiwei Lang, Jiayi Chen, Jianxin Wang, and Yongxiang Xu "Measurement to local phase modulation of LCSLM using multi-region synchronous processing of carrier interference fringe", Proc. SPIE 12071, 10th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing and Metrology Technologies, 120710I (13 December 2021); https://doi.org/10.1117/12.2604830

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