Design of a line-scanning dispersive objective lens for chromatic confocal displacement sensor

Tingting Huang; Jie Yang; Tao Ma

doi:10.1117/12.2604571

13 December 2021 Design of a line-scanning dispersive objective lens for chromatic confocal displacement sensor

Tingting Huang, Jie Yang, Tao Ma

Proceedings Volume 12071, 10th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing and Metrology Technologies; 120710S (2021) https://doi.org/10.1117/12.2604571
Event: Tenth International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2021), 2021, Chengdu, China

Abstract

An efficient optimal designing method for a quantitative dispersive objective lens used in line-scanning chromatic confocal displacement sensor was discussed. A multi-configuration optical system consisted of paraxial and diffractive surfaces was proposed to realize the quantitative inverse linear dispersion distance in the wide FOV. The ideal optical model was used as the objective FOV for the design of dispersive lens in the inverse optical path. The multi-configuration with the axial quantitative dispersion was implicit in the single configuration optical path, so that the image plane becomes a unified reference plane for image quality evaluation. With this method, a dispersive objective lens of 580nm-780nm working wavelength band and 0.37 mm axial dispersion distance was designed, which the line-scanning width is 16 mm and the dispersive linearity is better than 0.9997.

Citation Download Citation

Tingting Huang, Jie Yang, and Tao Ma "Design of a line-scanning dispersive objective lens for chromatic confocal displacement sensor", Proc. SPIE 12071, 10th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing and Metrology Technologies, 120710S (13 December 2021); https://doi.org/10.1117/12.2604571

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available