Features of the formation of highly sensitive nanoscale films SnO2 doped with platinum for sensing applications

K. A. Tsarik; V. A. Petukhov; N. S. Struchkov

doi:10.1117/12.2624651

30 January 2022 Features of the formation of highly sensitive nanoscale films SnO₂ doped with platinum for sensing applications

K. A. Tsarik, V. A. Petukhov, N. S. Struchkov

Author Affiliations +

Proceedings Volume 12157, International Conference on Micro- and Nano-Electronics 2021; 121570O (2022) https://doi.org/10.1117/12.2624651
Event: International Conference on Micro- and Nano-Electronics 2021, 2021, Zvenigorod, Russian Federation

Abstract

In this work, we consider the formation of a sensor layer 100 nm thick based on platinum-doped tin oxide. We investigated the method of forming an oxide film using magnetron sputtering Sn and Pt in Ar+O₂ plasma. Using X-ray diffraction, it was found that the film consists of nanoscale particles with a metal core. The average size of the nanoparticles forming the film was from 47 to 74 nm The characteristics of the film were measured during additional oxidation in the temperature range from 300 to 700 °C. Thanks to annealing, the resistance of the sensor layer can be varied from 10 kΩ to 100 MΩ at a detection temperature of 300 °C The optimized film has been tested to detect ethanol, acetone, and ammonia at streams of 50, 100, 150 ppm.

Citation Download Citation

K. A. Tsarik, V. A. Petukhov, and N. S. Struchkov "Features of the formation of highly sensitive nanoscale films SnO₂ doped with platinum for sensing applications", Proc. SPIE 12157, International Conference on Micro- and Nano-Electronics 2021, 121570O (30 January 2022); https://doi.org/10.1117/12.2624651

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