Competing mechanisms of strain relaxation in Ge/Si(001) heteroepitaxy

O. S. Trushin

doi:10.1117/12.2619657

30 January 2022 Competing mechanisms of strain relaxation in Ge/Si(001) heteroepitaxy

O. S. Trushin

Proceedings Volume 12157, International Conference on Micro- and Nano-Electronics 2021; 121571D (2022) https://doi.org/10.1117/12.2619657
Event: International Conference on Micro- and Nano-Electronics 2021, 2021, Zvenigorod, Russian Federation

Abstract

Atomistic simulation with semiempirical Stillinger-Weber potential has been used to study the energetics of strain relaxation in Ge/Si(001) heteroepitaxial system. Several alternative scenarios for misfit strain relief through dislocation nucleation have been investigated. Minimal energy path for each transition trajectory has been found using combination of modified DRAG and Nudged Elastic Band methods. Our results showed that standard 90° Lomer dislocation is the most favorable (global minimum) defect for this heteroepitaxial system. Alternative more complex defects containing two shifted 60° dislocations are indeed also local minima for this system, however corresponding to higher energy states. Their appearance in experiments might be the result of growth kinetics.

Citation Download Citation

O. S. Trushin "Competing mechanisms of strain relaxation in Ge/Si(001) heteroepitaxy", Proc. SPIE 12157, International Conference on Micro- and Nano-Electronics 2021, 121571D (30 January 2022); https://doi.org/10.1117/12.2619657

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available