Application of methods used in electron spectroscopy spectra interpretation to ion spectroscopy signals analysis

V. P. Afanas'ev; L. G. Lobanova; D. N. Selyakov; M. A. Semenov-Shefov

doi:10.1117/12.2623922

30 January 2022 Application of methods used in electron spectroscopy spectra interpretation to ion spectroscopy signals analysis

V. P. Afanas'ev, L. G. Lobanova, D. N. Selyakov, M. A. Semenov-Shefov

Author Affiliations +

Proceedings Volume 12157, International Conference on Micro- and Nano-Electronics 2021; 121571Q (2022) https://doi.org/10.1117/12.2623922
Event: International Conference on Micro- and Nano-Electronics 2021, 2021, Zvenigorod, Russian Federation

Abstract

The boundary value problem for the equation of proton transport in solids is solved on the basis of the invariant imbedding method. The equation obtained for the reflection function (in the small-angle approximation), coincided with the equation that was used for electron scattering and was solved on the basis of the OKG method. The obtained solutions for the reflection functions describe well all the features of the experimental data. Satisfactory agreement of calculations with experimental data is shown.

Citation Download Citation

V. P. Afanas'ev, L. G. Lobanova, D. N. Selyakov, and M. A. Semenov-Shefov "Application of methods used in electron spectroscopy spectra interpretation to ion spectroscopy signals analysis", Proc. SPIE 12157, International Conference on Micro- and Nano-Electronics 2021, 121571Q (30 January 2022); https://doi.org/10.1117/12.2623922

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