Uncertainty of the linewidth of a nanoobject at control it in a low-voltage SEM

Yu. V. Larionov; Yu. V. Ozerin

doi:10.1117/12.2624223

30 January 2022 Uncertainty of the linewidth of a nanoobject at control it in a low-voltage SEM

Yu. V. Larionov, Yu. V. Ozerin

Proceedings Volume 12157, International Conference on Micro- and Nano-Electronics 2021; 121571R (2022) https://doi.org/10.1117/12.2624223
Event: International Conference on Micro- and Nano-Electronics 2021, 2021, Zvenigorod, Russian Federation

Abstract

The relief structure (RS) with vertical sidewalls (SW) is promising as the linewidth measure for low-voltage (LV)SEM due to similarity of its profile to the one of the SCCDRM linewidth standards. So it can be used as the terminal link in the metrological traceability chain beginning from this standard. But there is an obstacle for its calibration: RS image are changing over time during continuous scanning the measure by electron beam that is natural for measure usage. Changes arise from the variation of the emission of slow secondary electrons (SSE) forming the image of the RS surface. This emission variation appears in turn due to the change of induced charge on the RS surface. Changes of the charge disposed near RS edges have critical influence on RS linewidth that leads to its value uncertainty. It is revealed that the degree of the influence depends on the layout of emitting site on RS sidewall (SW). Emission variations from its lower sites have a less induction on the RS image. So if one uses a regime of SSE extraction from these lower SW sites then the linewidth uncertainty is bound to decrease. Internal parts of the vertical SW are preferred not only due to its higher degree of its surface smoothness compared to its upper parts but also due to its SSE emission stability during scanning.

Citation Download Citation

Yu. V. Larionov and Yu. V. Ozerin "Uncertainty of the linewidth of a nanoobject at control it in a low-voltage SEM", Proc. SPIE 12157, International Conference on Micro- and Nano-Electronics 2021, 121571R (30 January 2022); https://doi.org/10.1117/12.2624223

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
9 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Remote sensing

Calibration

Scanning electron microscopy

Atomic force microscopy

Silicon

Transmission electron microscopy

Fabry–Perot interferometers

Show All Keywords

Keywords/Phrases

Search In:

Publication Years