Flexible phase control of spatial light modulators in interferometric surface figure tests

Shuai Xue; Yifan Dai; Lianmin Yin; Zhifan Lin

doi:10.1117/12.2605264

15 February 2022 Flexible phase control of spatial light modulators in interferometric surface figure tests

Shuai Xue, Yifan Dai, Lianmin Yin, Zhifan Lin

Proceedings Volume 12166, Seventh Asia Pacific Conference on Optics Manufacture and 2021 International Forum of Young Scientists on Advanced Optical Manufacturing (APCOM and YSAOM 2021); 121660F (2022) https://doi.org/10.1117/12.2605264
Event: Seventh Asia Pacific Conference on Optics Manufacture and 2021 International Forum of Young Scientists on Advanced Optical Manufacturing (APCOM and YSAOM 2021), 2021, Hong Kong, Hong Kong

Abstract

Introducing adaptive optics such as spatial light modulators (SLMs) can help troubleshoot the ‘one-to-one’ test mode of interferometric null surface figure tests for aspheric and free-form surfaces. However, the phase controlling accuracy of methods based on birefringence effects and phase-wrapping is too low for applying SLMs in interferometric surface figure tests. To this end, the flexible phase control method based on computer holography for SLMs is presented. The difference of phase control principle between the computer holography-based method and the birefringence effects and phase-wrapping based method is discussed. Phase control accuracy of the proposed method is about λ/30 (λ=632.8 nm) root-mean-square (RMS) according to the theoretical analysis result. The inherent wavefront error of a SLM Holoeye^TM LC 2012 is significantly nulled to from RMS 0.426λ to RMS 0.015λ, which verifies the high phase controlling accuracy of the proposed method. By troubleshooting the phase control accuracy issue, the presented method is promising for promoting the application of SLMs in interferometric surface figure tests.

Citation Download Citation

Shuai Xue, Yifan Dai, Lianmin Yin, and Zhifan Lin "Flexible phase control of spatial light modulators in interferometric surface figure tests", Proc. SPIE 12166, Seventh Asia Pacific Conference on Optics Manufacture and 2021 International Forum of Young Scientists on Advanced Optical Manufacturing (APCOM and YSAOM 2021), 121660F (15 February 2022); https://doi.org/10.1117/12.2605264

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KEYWORDS

Spatial light modulators

Interferometry

Phase shift keying

Holography

Birefringence

Wavefronts

Refractive index

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