Paper
15 February 2022 Analysis of impact mechanism of axial errors on circular grating corner sensor
Author Affiliations +
Proceedings Volume 12166, Seventh Asia Pacific Conference on Optics Manufacture and 2021 International Forum of Young Scientists on Advanced Optical Manufacturing (APCOM and YSAOM 2021); 1216648 (2022) https://doi.org/10.1117/12.2617193
Event: Seventh Asia Pacific Conference on Optics Manufacture and 2021 International Forum of Young Scientists on Advanced Optical Manufacturing (APCOM and YSAOM 2021), 2021, Hong Kong, Hong Kong
Abstract
The axial error is the main factor that causes the angular angle sensor error to eliminate, in order to improve the angle sensor accuracy, based on the round grating, from the geometric angle and the moir stripe angle, the axial error and the column grating and the end grating Establishing a mathematical model, and simulates the axial eccentricity and axial tilt errors. The simulation results show that the angular error error is proportional to the axial eccentricity; the influence of the axial tilt on the column grating is greater than the end grating. Axial error analysis provides a theoretical basis for determination of angular sensor shaft error inhibition.
© (2022) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Wenying Zhang and Haoran Zhu "Analysis of impact mechanism of axial errors on circular grating corner sensor", Proc. SPIE 12166, Seventh Asia Pacific Conference on Optics Manufacture and 2021 International Forum of Young Scientists on Advanced Optical Manufacturing (APCOM and YSAOM 2021), 1216648 (15 February 2022); https://doi.org/10.1117/12.2617193
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KEYWORDS
Error analysis

Sensors

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