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Recently, the full-area defect inspection of high-performance optical components such as large telescope mirrors is urgently demanded. An industrial robotic arm is suitable for conducting the scanning movement of defect inspection systems, and another monitoring system is needed to guide the moving trajectory of the robotic arm. An efficient and precise guiding system is developed based on a laser projection measuring system. After the calibration of the measuring system, real-time point clouds of the component under test can be acquired. Denoising and registration of the point clouds are conducted to align the robot coordinate system with the workpiece coordinate system. Then, the scanning inspection can be conducted all over the component under test. Experimental results demonstrate that the system has high efficiency and accuracy within 17.59 μm
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