Simulation research of illumination system with coherent noise suppression

Xianhao Qi; Sen Han; Linghua Zhang; Xianyu Wu; Jun Cheng; Erhui Qi; Haixiang Hu

doi:10.1117/12.2642907

19 December 2022 Simulation research of illumination system with coherent noise suppression

Xianhao Qi, Sen Han, Linghua Zhang, Xianyu Wu, Jun Cheng, Erhui Qi, Haixiang Hu

Proceedings Volume 12319, Optical Metrology and Inspection for Industrial Applications IX; 123191A (2022) https://doi.org/10.1117/12.2642907
Event: SPIE/COS Photonics Asia, 2022, Online Only

Conference Poster

Abstract

An illumination system for coherent noise suppression is envisioned. The principle of coherent noise suppression is introduced, and this illumination system is designed this way. The illumination system is simulated, and the hybrid sequence model of Zemax analyzes the irradiance. To verify the noise suppression effect of this illumination system, it is used as the illumination part of the Fizeau interferometer. The interference process is simulated under the nonsequential model of Zemax to obtain an off-axis light source with a ring radius of 0.32 mm and a numerical aperture of 0.14. The Fizeau interferometer with a conventional light source is also simulated. A comparison experiment is set up to generate the same noise point in the two interferometers using different illumination modes to trace and produce the same four interference fringes with the same interferometric cavity length of 20 mm and the same tilt angle of the measured surface of 0.057°. Compared with the interferograms in the conventional illumination mode, the interference fringes formed by the illumination of this study are almost undamaged, and the near-complete interference information can be retained. The interferometer system with this light source was built and the test results were verified, and it was found that it could achieve the measurement accuracy of 1/20 wavelength and the measurement stability of 1.219 nm, and it also had a good contrast of interference fringe.

Citation Download Citation

Xianhao Qi, Sen Han, Linghua Zhang, Xianyu Wu, Jun Cheng, Erhui Qi, and Haixiang Hu "Simulation research of illumination system with coherent noise suppression", Proc. SPIE 12319, Optical Metrology and Inspection for Industrial Applications IX, 123191A (19 December 2022); https://doi.org/10.1117/12.2642907

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