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19 December 2022 Algorithm for local nonlinear error calibration of displacement sensor based on C2 continuous interpolation
Bin Mao, Jingfan Wang, Hui Liu, Fei Feng, Wei Zhou
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Proceedings Volume 12319, Optical Metrology and Inspection for Industrial Applications IX; 123191C (2022) https://doi.org/10.1117/12.2643131
Event: SPIE/COS Photonics Asia, 2022, Online Only
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Abstract
The laser displacement sensor based on the triangulation method has the advantages of large range, high precision, and strong anti-interference. Due to the limitation of the measurement principle, although the laser displacement sensor has high repeated measurement accuracy, it has serious high-order nonlinear system errors. Considering that in some measurement occasions, only a few local measurement intervals within the range are used. In this paper, a local nonlinear error calibration algorithm based on C2 continuous interpolation was proposed. A nonlinear calibration model was established by intensive calibration data acquisition in the local interval of the measurement application. The model can be smoothly connected with the original linear calibration model. At the same time, the measurement accuracy of the local area is greatly improved without affecting the accuracy of other intervals.
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Bin Mao, Jingfan Wang, Hui Liu, Fei Feng, and Wei Zhou "Algorithm for local nonlinear error calibration of displacement sensor based on C2 continuous interpolation", Proc. SPIE 12319, Optical Metrology and Inspection for Industrial Applications IX, 123191C (19 December 2022); https://doi.org/10.1117/12.2643131
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KEYWORDS
Calibration
Sensors
Sensor calibration
Error analysis
Time metrology
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