Research on interferometric inspection of surface topography of ring elements

Jun Cheng; Sen Han; Xiaoyue Bian; Xianyu Wu; Xianhao Qi; Linghua Zhang; Qiang Cheng

doi:10.1117/12.2643403

19 December 2022 Research on interferometric inspection of surface topography of ring elements

Jun Cheng, Sen Han, Xiaoyue Bian, Xianyu Wu, Xianhao Qi, Linghua Zhang, Qiang Cheng

Proceedings Volume 12319, Optical Metrology and Inspection for Industrial Applications IX; 123191F (2022) https://doi.org/10.1117/12.2643403
Event: SPIE/COS Photonics Asia, 2022, Online Only

Conference Poster

Abstract

Ring elements are of great significance in the field of precision machining, and their performance is crucial for the functionality of the whole system. However, the present frequent inspection of such components lacks effective means and is prone to causing damage to the component. In view of this, this article on the basis of comprehensive research, combined with the principle of optical interference detection, puts forward a measuring method for such components, the method by introducing a pyramid to realize high precision optical path, and according to the inner surface in the shape of different components, it can be divided into cylinder and circular arc surfaces, respectively, measuring scheme is designed. Then, according to the designed inspection scheme, the system is built separately for inspection. After the system is stable, the shape information of the tested part is obtained. After the system is stabilized, the shape information of the inspected part is obtained. The shape information of the inner surface of the ring element can be obtained after only one inspection.

Citation Download Citation

Jun Cheng, Sen Han, Xiaoyue Bian, Xianyu Wu, Xianhao Qi, Linghua Zhang, and Qiang Cheng "Research on interferometric inspection of surface topography of ring elements", Proc. SPIE 12319, Optical Metrology and Inspection for Industrial Applications IX, 123191F (19 December 2022); https://doi.org/10.1117/12.2643403

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