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14 October 2022 Miniature, high-sensitivity optical fiber pressure sensor based on all-silica Fabry-Perot interference
Jinyao Qiu, Junjie Wang
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Proceedings Volume 12343, 2nd International Conference on Laser, Optics and Optoelectronic Technology (LOPET 2022); 123430O (2022) https://doi.org/10.1117/12.2649165
Event: 2nd International Conference on Laser, Optics and Optoelectronic Technology (LOPET 2022), 2022, Qingdao, China
Abstract
High sensitivity fiber optic pressure sensor is in great demand in in all aspects due to its advantages. However, the current high sensitivity optical fiber pressure sensor has the problems of large size and high cost. An optical fiber pressure sensor based on all-silica Fabry-Perot interference has been proposed in this paper. The sensor consists of single mode fiber, silica capillary and diaphragm made of coreless optical fiber. The diameter of the sensor is only 125 μm. With precise control of diaphragm thinning, the diaphragm thickness of F-P sensor is only 1.477 μm, the sensor manufactured in this way has sensitivity with 12.586 rad/MPa. The sensor is ease of manufacturing and low cost. Static calibration shown the advantages of the sensor are high sensitivity, good linearity, repeatability, reliability and low hysteresis.
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Jinyao Qiu and Junjie Wang "Miniature, high-sensitivity optical fiber pressure sensor based on all-silica Fabry-Perot interference", Proc. SPIE 12343, 2nd International Conference on Laser, Optics and Optoelectronic Technology (LOPET 2022), 123430O (14 October 2022); https://doi.org/10.1117/12.2649165
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KEYWORDS
Sensors
Optical fibers
Etching
Manufacturing
Fabry–Perot interferometers
Silica
Single mode fibers
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