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10 March 2023 Parametric study on the electro-optical performances of curved CMOS BSI image sensors
Wilfried Jahn, Marc Renard, Kelly Joaquina, Quentin Struss, Simon Cornu, Sabri Lemared
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Proceedings Volume 12415, Physics and Simulation of Optoelectronic Devices XXXI; 124150C (2023) https://doi.org/10.1117/12.2648632
Event: SPIE OPTO, 2023, San Francisco, California, United States
Abstract
Curved imaging sensors bring significant size, weight and cost reduction to imaging systems while mitigating offaxis optical aberrations, as opposed to current flat sensors. Unlocking these key features has captured the interest of major players over the last two decades. SILINA has been developing a CMOS Image Sensor (CIS) curving process, which adapts to various sensor characteristics. This enables to maximize the optical performance of every single imaging system. We have demonstrated the manufacturing of curved CMOS Front-Side Illuminated (FSI) and Back Side Illuminated (BSI), opening a new area of compact, fast, wide-angle and high-resolution optical lenses. An EMVA1288 compliant CMOS image sensor characterization testbeds has been developed in order to measure the electro-optical performances of curved CIS. Experimental data of dark current, photo-response nonuniformity, fixed pattern noise, quantum efficiency and more can be measured. In parallel to the electro-optical characterization campaign, reliability tests such as thermal tests (ageing, cycling) have been performed. This paper gives an overview of SILINA‘s main technological developments and electro-optical performance of CMOS Back Side Illuminated (BSI) curved image sensors is presented.
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Wilfried Jahn, Marc Renard, Kelly Joaquina, Quentin Struss, Simon Cornu, and Sabri Lemared "Parametric study on the electro-optical performances of curved CMOS BSI image sensors", Proc. SPIE 12415, Physics and Simulation of Optoelectronic Devices XXXI, 124150C (10 March 2023); https://doi.org/10.1117/12.2648632
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KEYWORDS
Image sensors
Electro optics
CMOS sensors
Imaging systems
Manufacturing
Reliability
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